The semiconductor and electronics industry continues to improve the performance of integrated circuits. Trend towards smaller linewidths has increased the importance of contamination control for every step of semiconductor process. 3M Purification products have been shown to provide superior removal of hard and soft gel contaminant, higher flow rate, increase overall equipment efficiency and consistent level of filtration.
3M products provide solutions for the unique filtration challenges of advanced manufacturing technologies. A full range of filters and housings can be ordered to address every process need - from ultra-pure water to complex slurry distribution. Purification is a leader in advanced filter systems and membrane based separations, offering a range of products for semiconductor and electronic component manufacturing.
Applications Include
High Purity Water
Printed Circuit Board Manufacture
Compact Disc Manufacture
Semiconductor FAB
Hard Disc Drive Manufacture
Flat Panel Displays Manufacture
Cathode Ray Tube Manufacture
Ceramic Capacitor Manufacture
CMP slurry Manufacture and distribution loop
Photoresist Manufacture
High Purity Chemicals Manufacture
Metal Trace Removal
From lab. scale to production
Solutions include :
Polypro XL : High flow rate polypropylene pleated cartridges with high consistant performance.
Zetapor ER : Nylon membrane cartridges , naturaly hydrophilic.
MicroFluor E : High Flow PTFE membrane cartridge.
Optima CMP : Polypropylene graded porosity catridges and capsules dedicated to CMP slurry filtration.
NanoShield : the new hollow fiber technology applied to photoresist and high purity chemicals filtration , provide longer life, higher flow rate.
ChemSECURE : 100% pure polypropylene filter housing (for 5", 10" and 20" filter elements)
